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TitleQuality factor of thin-film Fabry-Perot resonators: dependence on interface roughness
Author(s)Bartek, M.
Novotny, I.
Correia, J. H.
Tvarozek, V.
KeywordsFabry-Perot resonators
Quality factor
Surface roughness
Light scattering
Issue date12-Sep-1999
CitationIn BARTEK, Marian, ed. lit. – “Eurosensors XIII : proceedings of the 13th European Conference on Solid-State Transducers” [CD-ROM]. [S.l.] : InetLingua, 1999. ISBN 90-76699-02-X. p. 523-526.
Abstract(s)Thin-film Fabry-Perot (F-P) optical resonators are studied for application as wavelength-selecting elements in on-chip spectrometers. The interface roughness between the different resonator layers (Al /PECVD SiO2 / Ag) is identified to be the primary source of light scattering and energy losses. It is demonstrated that conventional IC fabrication yields layers with RMS interface roughness easily exceeding 10 nm. When applied to the visible spectral range, such a roughness causes significant degradation of the F-P filter quality factor. Moreover, the scattered light contributes to transmittance outside the narrow resonance band to which the F-P filter is tuned and overall device performance is decreased.
TypeConference paper
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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