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TitleA flexible Li-ion battery with design towards electrodes electrical insulation
Author(s)Vieira, E. M. F.
Ribeiro, J. F.
Sousa, R.
Correia, J. H.
Gonçalves, L. M.
Li-ion batteries
Electrical insulation
MEMS systems
Issue date2016
PublisherIOP Publishing
JournalJournal of Micromechanics and Microengineering
Abstract(s)The application of micro electromechanical systems (MEMS) technology in several consumer electronics leads to the development of micro/nano power sources with high power and MEMS integration possibility. This work presents the fabrication of a flexible solid-state Li-ion battery (LIB) (~2.1 μm thick) with a design towards electrodes electrical insulation, using conventional, low cost and compatible MEMS fabrication processes. Kapton® substrate provides flexibility to the battery. E-beam deposited 300 nm thick Ge anode was coupled with LiCoO2/LiPON (cathode/solid-state electrolyte) in a battery system. LiCoO2 and LiPON films were deposited by RF-sputtering with a power source of 120W and 100W, respectively. LiCoO2 film was annealed at 400 °C after deposition. The new design includes Si3N4 and LiPO thin-films, providing electrode electrical insulation and a battery chemical stability safeguard, respectively. Microstructure and battery performance were investigated by scanning electron microscopy, electric resistivity and electrochemical measurements (open circuit potential, charge/discharge cycles and electrochemical impedance spectroscopy). A rechargeable thin-film and lightweight flexible LIB using MEMS processing compatible materials and techniques is reported.
Publisher version
AccessRestricted access (UMinho)
Appears in Collections:DEI - Artigos em revistas internacionais

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