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|Title:||Electrical insulation properties of RF-sputtered LiPON layers towards electrochemical stability of lithium batteries|
|Author(s):||Vieira, E. M. F.|
Ribeiro, J. F.
Silva, Maria Manuela
Barradas, N. P.
Correia, M. R.
Gonçalves, L. M.
|Journal:||Journal of Physics D: Applied Physics|
|Abstract(s):||Electrochemical stability, moderate ionic conductivity and low electronic conductivity make the lithium phosphorous oxynitride (LiPON) electrolyte suitable for micro and nanoscale lithium batteries. The electrical and electrochemical properties of thin-film electrolytes can seriously compromise full battery performance. Here, radio-frequency (RF)-sputtered LiPON thin films were fabricated in nitrogen plasma under different working pressure conditions. With a slight decrease in the deposition pressure from 6 to 1 × 10−3 mbar, the 600 nm thick LiPON film reveals an electric resistivity increase from 108 to 1010 Ω · cm, respectively. UV– micro-Raman spectroscopy confirms the nitrogen incorporation on the Li3PO4 material, while scanning electron microscopy, Rutherford backscattering spectrometry and nuclear reaction analysis show a well-defined compact structure with a composition of Li2.2PO2.2N0.6 for the higher electrical-resistivity film. An ionic conductivity close to 3 × 10−7 S cm−1 at room temperature (22 °C) was measured by AC impedance spectroscopy. Thermal properties were investigated through the differential scanning calorimetry technique. LiPON films reveal high optical transmission (>75%) in the UV–vis range, which could be interesting for transparent electronic devices.|
|Access:||Restricted access (UMinho)|
|Appears in Collections:||DEI - Artigos em revistas internacionais|
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