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TitleMicromachined fabry-perot optical filters
Author(s)Bartek, M.
Correia, J. H.
Wolffenbuttel, R. F.
KeywordsOptical filters
Issue date5-Oct-1998
CitationINTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, 2, Smolenice Castle, Slovakia, 1998 – “ASDAM’98 : proceedings”. New Jersey : IEEE, 1998. ISBN 0-7803-4909-1. p. 283-286.
Abstract(s)The design, fabrication and measured characteristics of micromachined Fabry- Perot (F-P) optical filters for the visible spectral range are presented. Silver films of 40-50 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride membrane, are used as high-quality mirrors. Two parallel mirrors, with a square aperture of up to 2x2 mm2 and initial cavity gap of 1.2 µm, form a tunable Fabry- Perot optical filter. One of the mirrors is fixed the other is under tension on a movable Si frame, which is electrostatically deflected to control the mirror spacing and parallelism. Results are compared with non-tunable F-P filters that are composed of an Ag/SiN/Ag or Ag/SiO2/Al layer stack. The FWHM of 40 nm (tunable filter) and 16 nm (non-tunable filter) have been achieved.
TypeConference paper
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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