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TitleLoad-deflection of a low-stress SiN-membrane/Si-frame composite diaphragm
Author(s)Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
KeywordsSiN membrane
Issue date1998
CitationINTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, SEMICONDUCTERS, SENSORS AND ACTUATORS, 1, Santa Clara Marriott, CA, USA, 1998 – “International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators : proceedings”. Cambridge, MA : Computational Publications, 1998. ISBN 0-9666135-0-3. p. 563-568.
Abstract(s)This paper reports on the use of Finite-Element-Methods (FEM) to model and simulate a non-planar composite diaphragm, which is to be used in silicon microinterferometers. Geometrical form, bending distances, deflection, stress, fatigue and flatness of a diaphragm based on a low stress silicon nitride membrane/Si frame are simulated and compared with experimental results. The ability to accurately simulate in detail the diaphragm mechanical behavior through FEM was demonstrated.
TypeConference paper
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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