Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/4430

TitleRaman analysis of Si–C–N films grown by reactive magnetron sputtering
Author(s)Liang, E. J.
Zhang, J. W.
Leme, J.
Moura, C.
Cunha, L.
KeywordsSi–C–N thin films
PVD
X-ray photoelectron spectroscopy
Raman spectroscopy
Issue date2004
PublisherElsevier
JournalThin Solid Films
Citation"Thin Solid Films". ISSN 0040-6090. 469/470 (2004) 410-415.
Abstract(s)Silicon carbon nitride thin films have been deposited by reactive magnetron sputtering of silicon and graphite targets in mixed Ar/N2 atmosphere at substrate temperature of 300 °C. The substrate bias voltage varied from -50 up to +50 Vand the nitrogen flow rate varied from 0 to 20 sccm. The as-deposited films were analyzed by Raman spectroscopy (RS) and X-ray photoelectron spectroscopy (XPS). The Raman analyses show that the film without nitrogen incorporation has mixed sp2–sp3-hybridized carbon structures while those with nitrogen introduction give rise to nitrogen-bound sp1-, sp2- and sp3-coordinated carbon structures as well as Si–N phase. The change of the D band position (~1360 cm-1), FWHM and its relative intensity with respect to the G band (~1595 cm-1), ID/IG, seem to be correlated with the formation of these phases and therefore to the deposition conditions. XPS analyses not only confirm the bonding natures revealed by Raman spectroscopy, but also give quantitatively the relative importance of the phases. It was shown that the area ratio of the nitrogen-bound sp3- to sp2-coordinated carbon bonds is: 1.41:1.38:1.8:3.19 and that of Si-N bonds to (Si-N+Si-C) bonds is 0.4:0.5:0.9:1 for the Si–C–N films prepared with 5, 10, 15 and 20 sccm nitrogen flow rate, respectively.
TypeArticle
URIhttp://hdl.handle.net/1822/4430
DOI10.1016/j.tsf.2004.09.002
ISSN0040-6090
Publisher versionwww.elsevier.com/wps/find/journaldescription.cws_home/504106/description?navopenmenu=-2
Peer-Reviewedyes
AccessOpen access
Appears in Collections:CDF - FMNC - Artigos/Papers (with refereeing)
CDF - GRF - Artigos/Papers (with refereeing)

Files in This Item:
File Description SizeFormat 
TSF_469(2004)_SiCN.pdfDocumento Principal444,99 kBAdobe PDFView/Open

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu ORCID