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TitleX-rays microdetectors based on an array of scintillators : a maskless process using laser ablation
Author(s)Rocha, J. G.
Moreira, M. V.
Wolffenbuttel, R. F.
Ramos, N. F.
Lanceros-Méndez, S.
Correia, J. H.
Digital radiology
Laser ablation
Issue date2002
CitationSENSORS 2002 - IEEE INTERNATIONAL CONFERENCE ON SENSORS, 1, Orlando - "Interrnational Conference on Sensors : Proceedings". [S.l. : s.n., 2002]. ISBN 0-7803-7454-1.
Abstract(s)This paper describes a X-rays microdetector based on an array of wells filled with scintillator crystals. A thick-film of aluminum (500 um) is etched by Laser Ablation Technique (LAT) in order to achieve a square well with side of 100 um and 490 um deep vertical sidewalls. The aluminum thick-film was chosen because it is a good reflector in the visible range and for improving the number of photons collected by each photodetector. Also, the cross-talk between adjacent wells is reduced. As first approach, for a 4x4 wells array prototype, LAT is an inexpensive process when compared with Deep Reactive Ion Etching (DRIE) and avoids the need of etching masks. In this system the X-ray energy is first converted to visible light by the scintillator. This light is then detected by a photodetector fabricated in a standard CMOS process.
TypeConference paper
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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