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TitleHigh-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
Author(s)Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
KeywordsArray-type microspectrometer
Fabry–Perot etalon
Optical filter
Visible light detector
Issue dateMar-2000
JournalIEEE Transactions on Electron Devices
Citation"IEEE Transactions on Electron Devices". ISSN 0018-9383. 47:3 (Mar. 2000) 553-559.
Abstract(s)A microspectrometer has been realized based on an array of Fabry–Perot optical thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the visible spectral range with an interchannel shift of 6 nm. Each of the channels is sensitive in a single peak with full-width-half-maximum (FWHM) of 16 nm. Also aFWHMbelow 2 nm and finesse of 40 for narrow band operation is demonstrated. The device can easily be tuned during fabrication to cover a different spectral band only by adjusting the etching times without affecting the device layout. Such a device is extremely suitable for applications in microsystems because of its small size, high spectral selectivity, and low cost. Microspectrometers for the UV and IR regions are also feasible using this technique.
AccessOpen access
Appears in Collections:DEI - Artigos em revistas internacionais

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