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https://hdl.handle.net/1822/39819
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Campo DC | Valor | Idioma |
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dc.contributor.author | Borges, Joel Nuno Pinto | por |
dc.contributor.author | Macedo, Francisco | por |
dc.contributor.author | Couto, F. M. | por |
dc.contributor.author | Rodrigues, M.S. | por |
dc.contributor.author | Lopes, Cláudia Jesus Ribeiro | por |
dc.contributor.author | Pedrosa, P. | por |
dc.contributor.author | Polcar, T. | por |
dc.contributor.author | Marques, L. | por |
dc.contributor.author | Vaz, F. | por |
dc.date.accessioned | 2016-02-01T10:00:21Z | - |
dc.date.issued | 2015 | - |
dc.identifier.citation | Borges, J., Macedo, F., Couto, F. M., Rodrigues, M. S., Lopes, C., Pedrosa, P., . . . Vaz, F. (2015). The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin films. Materials Chemistry and Physics, 163, 569-580. doi: 10.1016/j.matchemphys.2015.08.015 | por |
dc.identifier.issn | 0254-0584 | - |
dc.identifier.uri | https://hdl.handle.net/1822/39819 | - |
dc.description.abstract | The ternary aluminium oxynitride (AlNxOy) system offers the possibility to obtain a wide range of properties by tailoring the ratio between pure Al, AlNx and AlOy and therefore opening a significant number of possible applications. In this work the thermal behaviour of AlNxOy thin films was analysed by modulated infrared radiometry (MIRR), taking as reference the binary AlOy and AlNx systems. MIRR is a non-contact and non-destructive thermal wave measurement technique based on the excitation, propagation and detection of temperature oscillations of very small amplitudes. The intended change of the partial pressure of the reactive gas (N2 and/or O2) influenced the target condition and hence the deposition characteristics which, altogether, affected the composition and microstructure of the films. Based on the MIRR measurements and their qualitative and quantitative interpretation, some correlations between the thermal transport properties of the films and their chemical/physical properties have been found. Furthermore, the potential of such technique applied in this oxynitride system, which present a wide range of different physical responses, is also discussed. The experimental results obtained are consistent with those reported in previous works and show a high potential to fulfil the demands needed for the possible applications of the systems studied. They are clearly indicative of an adequate thermal response if this particular thin film system is aimed to be applied in small sensor devices or in electrodes for biosignal acquisition, such as those for electroencephalography or electromyography as it is the case of the main research area that is being developed in the group. | por |
dc.description.sponsorship | This research is sponsored by FEDER funds through the program COMPETE – Programa Operacional Factores de Competitividade – and by National funds through FCT – Fundação para a Ciência e a Tecnologia –, under the projects PEST-C/FIS/UI607/2013, PEst-C/EME/UI0285/2013. J. Borges also acknowledges the support by the European social fund within the framework of realizing the project “Support of inter-sectoral mobility and quality enhancement of research teams at Czech Technical University in Prague”, CZ.1.07/2.3.00/30.0034. F.M. Couto acknowledges CAPES - Foundation, Ministry of Education of Brazil, Brasília – DF 70040-020, Brazil, funding by stage sandwich doctorate, through PDSE - Doctoral Program Sandwich. | por |
dc.language.iso | eng | por |
dc.publisher | Elsevier | por |
dc.relation | info:eu-repo/grantAgreement/FCT/COMPETE/132974/PT | por |
dc.relation | info:eu-repo/grantAgreement/FCT/COMPETE/132998/PT | por |
dc.rights | restrictedAccess | por |
dc.subject | Sputtering | por |
dc.subject | Thin Films | por |
dc.subject | Nitrides | por |
dc.subject | Oxides | por |
dc.subject | Microstructure | por |
dc.subject | Thermal properties | por |
dc.title | The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin films | por |
dc.type | article | por |
dc.peerreviewed | yes | por |
dc.relation.publisherversion | http://www.sciencedirect.com/science/article/pii/S0254058415302741# | por |
sdum.publicationstatus | published | por |
oaire.citationStartPage | 569 | por |
oaire.citationEndPage | 580 | por |
oaire.citationTitle | Materials Chemistry and Physics | por |
oaire.citationVolume | 163 | por |
dc.identifier.doi | 10.1016/j.matchemphys.2015.08.015 | por |
dc.subject.fos | Ciências Naturais::Ciências Físicas | por |
dc.subject.wos | Science & Technology | por |
sdum.journal | Materials Chemistry and Physics | por |
Aparece nas coleções: | CDF - GRF - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Manuscript J Borges et al.pdf Acesso restrito! | 945,67 kB | Adobe PDF | Ver/Abrir |