Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/39819

TitleThe influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin films
Author(s)Borges, Joel Nuno Pinto
Macedo, Francisco
Couto, F. M.
Rodrigues, M.S.
Lopes, Cláudia Jesus Ribeiro
Pedrosa, P.
Polcar, T.
Marques, L.
Vaz, F.
KeywordsSputtering
Thin Films
Nitrides
Oxides
Microstructure
Thermal properties
Issue date2015
PublisherElsevier
JournalMaterials Chemistry and Physics
CitationBorges, J., Macedo, F., Couto, F. M., Rodrigues, M. S., Lopes, C., Pedrosa, P., . . . Vaz, F. (2015). The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin films. Materials Chemistry and Physics, 163, 569-580. doi: 10.1016/j.matchemphys.2015.08.015
Abstract(s)The ternary aluminium oxynitride (AlNxOy) system offers the possibility to obtain a wide range of properties by tailoring the ratio between pure Al, AlNx and AlOy and therefore opening a significant number of possible applications. In this work the thermal behaviour of AlNxOy thin films was analysed by modulated infrared radiometry (MIRR), taking as reference the binary AlOy and AlNx systems. MIRR is a non-contact and non-destructive thermal wave measurement technique based on the excitation, propagation and detection of temperature oscillations of very small amplitudes. The intended change of the partial pressure of the reactive gas (N2 and/or O2) influenced the target condition and hence the deposition characteristics which, altogether, affected the composition and microstructure of the films. Based on the MIRR measurements and their qualitative and quantitative interpretation, some correlations between the thermal transport properties of the films and their chemical/physical properties have been found. Furthermore, the potential of such technique applied in this oxynitride system, which present a wide range of different physical responses, is also discussed. The experimental results obtained are consistent with those reported in previous works and show a high potential to fulfil the demands needed for the possible applications of the systems studied. They are clearly indicative of an adequate thermal response if this particular thin film system is aimed to be applied in small sensor devices or in electrodes for biosignal acquisition, such as those for electroencephalography or electromyography as it is the case of the main research area that is being developed in the group.
TypeArticle
URIhttp://hdl.handle.net/1822/39819
DOI10.1016/j.matchemphys.2015.08.015
ISSN0254-0584
Publisher versionhttp://www.sciencedirect.com/science/article/pii/S0254058415302741#
Peer-Reviewedyes
AccessRestricted access (UMinho)
Appears in Collections:CDF - GRF - Artigos/Papers (with refereeing)

Files in This Item:
File Description SizeFormat 
Manuscript J Borges et al.pdf
  Restricted access
945,67 kBAdobe PDFView/Open

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu ORCID