Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/3778

TitleSilver-based reflective coatings for micromachined optical filters
Author(s)Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
KeywordsOptical filters
Silver coating
Issue dateSep-1999
PublisherIOP Publishing
JournalJournal of micromechanics and microengineering
Citation"Journal of micromechanics and microengineering". ISSN 0960-1317. 9:2 (June 1999) 162-165.
Abstract(s)Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry–P´erot optical filter. Investigation of the silver-based reflective coatings, and mirror characterization, including influence of bulk micromachining, are presented
TypeArticle
URIhttp://hdl.handle.net/1822/3778
ISSN0960-1317
Peer-Reviewedyes
AccessOpen access
Appears in Collections:DEI - Artigos em revistas internacionais

Files in This Item:
File Description SizeFormat 
artigo5.pdfdocumento principal422,15 kBAdobe PDFView/Open

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu ORCID