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TitleSilver-based reflective coatings for micromachined optical filters
Author(s)Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
KeywordsOptical filters
Silver coating
Issue dateSep-1999
PublisherIOP Publishing
JournalJournal of micromechanics and microengineering
Citation"Journal of micromechanics and microengineering". ISSN 0960-1317. 9:2 (June 1999) 162-165.
Abstract(s)Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry–P´erot optical filter. Investigation of the silver-based reflective coatings, and mirror characterization, including influence of bulk micromachining, are presented
AccessOpen access
Appears in Collections:DEI - Artigos em revistas internacionais

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