Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/37380

TitleA chemically stable PVD multilayer encapsulation for lithium microbatteries
Author(s)Ribeiro, J. F.
Sousa, R.
Cunha, D. J.
Vieira, E. M. F.
Silva, Maria Manuela
Dupont, L.
Goncalves, L. M.
KeywordsMicrobatteries
Lithium
Encapsulation
PVD
Multilayer
Issue date2015
PublisherIOP Publishing
JournalJournal of Physics D: Applied Physics
CitationRibeiro, J. F., Sousa, R., Cunha, D. J., Vieira, E. M. F., Silva, M. M., Dupont, L., & Goncalves, L. M. (2015). A chemically stable PVD multilayer encapsulation for lithium microbatteries. Journal of Physics D: Applied Physics, 48(39). doi: 10.1088/0022-3727/48/39/395306
Abstract(s)A multilayer physical vapour DEPOSITION (PVD) thin-film encapsulation method for lithium microbatteries is presented. Lithium microbatteries with a lithium cobalt oxide (LiCoO2) cathode, a lithium phosphorous oxynitride (LiPON) electrolyte and a metallic lithium anode are under development, using PVD DEPOSITION techniques. Metallic lithium film is still the most common anode on this battery technology; however, it presents a huge challenge in terms of material encapsulation (lithium reacts with almost any materials deposited on top and almost instantly begins oxidizing in contact with atmosphere). To prove the encapsulation concept and perform all the experiments, lithium films were deposited by thermal evaporation technique on top of a glass substrate, with previously patterned Al/Ti contacts. Three distinct materials, in a multilayer combination, were tested to prevent lithium from reacting with protection materials and atmosphere. These multilayer films were deposited by RF sputtering and were composed of lithium phosphorous oxide (LiPO), LiPON and silicon nitride (Si3N4). To complete the long-term encapsulation after breaking the vacuum, an epoxy was applied on top of the PVD multilayer. In order to evaluate oxidation state of lithium films, the lithium resistance was measured in a four probe setup (cancelling wires/contact resistances) and resistivity calculated, considering physical dimensions. A lithium resistivity of 0.16 Ω μm was maintained for more than a week. This PVD multilayer exonerates the use of chemical vapour DEPOSITION(CVD), glove-box chambers and sample manipulation between them, significantly reducing the fabrication cost, since battery and its encapsulation are fabricated in the same PVD chamber.
TypeArticle
URIhttp://hdl.handle.net/1822/37380
DOI10.1088/0022-3727/48/39/395306
ISSN0022-3727
Publisher versionhttp://iopscience.iop.org/article/10.1088/0022-3727/48/39/395306/pdf
Peer-Reviewedyes
AccessRestricted access (UMinho)
Appears in Collections:CAlg - Artigos em revistas internacionais/Papers in international journals
CDQuim - Artigos (Papers)
DEI - Artigos em revistas internacionais

Files in This Item:
File Description SizeFormat 
A chemically stable PVD multilayer encapsulation for lithium microbatteries.pdf
  Restricted access
Paper849,12 kBAdobe PDFView/Open    Request a copy!

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu ORCID