3 axis polymeric accelerometer and method of production

Abstract

The present invention consists in a thermal accelerometer capable of detecting acceleration in multiple axes. The accelerometer is made of four microinjected polymeric parts (1, 2, 3, 4), which can be two identical top parts and two identical central parts or four different parts, which are assembled with active polymeric membranes (5, 6, 7) to construct the 3-axis acceleration sensing device. The microinjected parts provide mechanical support for the heater and temperature sensors that are placed on the membranes. The device operating gas medium is hermetically sealed by the polymer parts and electrical current applied to the heater causes the air to heat and external acceleration imposes a gradient of temperature sensed by the thermal sensing elements.