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TitleCapacitively coupled hydrogen discharges : modeling vs. experiment
Author(s)Marques, L.
Jolly, Jacques
Gousset, G.
Alves, L. L.
KeywordsCapacitively coupled discharges
Radio-frequency discharges
Hydrogen plasma
Hydrogen atoms
Kinetic model
Issue dateDec-2004
PublisherBegell House, Inc.
JournalHigh Temperature Material Processes
Citation"High Temperature Material Processes" ISSN 1093-3611. 8 (2004) 499-519.
Abstract(s)This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequencies, pressures and applied voltages. However, the model generally underestimates the electron density and the self-bias potential with respect to measured values. Model predictions for the absolute density of H(n=1) atoms are compared to first diagnostic results, obtained by two-photon absorption laser-induced fluorescence diagnostics at various pressures and frequencies.
AccessOpen access
Appears in Collections:CDF - FCT - Artigos/Papers (with refereeing)

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