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TitleClosed-loop operated time-based accelerometer
Author(s)Dias, Rosana A.
Macedo, Pedro
Silva, Hélder D.
Wolffenbuttel, R. F.
Cretu, E.
Rocha, Luís A.
KeywordsClosed-loop MEMS accelerometer
Pull-in accelerometer
Issue dateOct-2012
JournalProcedia Engineering
Abstract(s)A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation mechanism to control the duration of the pull-in time is presented, which addresses the low dynamic range problem. Capacitive parallel-plates structures were used and the preliminary experimental results of closed-loop operation under several acceleration values confirm the potential of this technique and the overall accelerometer concept. The results show an accelerometer with high sensitivity (better than 6 μV/μg) and improved linearity over a large dynamic range.
TypeConference paper
AccessRestricted access (UMinho)
Appears in Collections:IPC - Artigos em revistas científicas internacionais com arbitragem

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