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Issue DateTitleAuthor(s)TypeAccess
2015Effect of argon ion energy on the performance of silicon nitridemultilayer permeation barriers grown by hot-wire CVD on polymersAlpuim, P.; Majee, S.; Cerqueira, M. F.; Tondelier, D.; Geffroy, B.; Bonnassieux, Y.; Bourée, J. E.ArticleOpen access
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