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Issue DateTitleAuthor(s)TypeAccess
Apr-2009Deposition of silicon nitride thin films by hot-wire CVD at 100ºC and 250ºCAlpuim, P.; Gonçalves, L. M.; Marins, Emílio Sérgio; Viseu, T. M. R.; Ferdov, S.; Bourée, J. E.ArticleOpen access
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