X-Ray CMOS detector array with scintillating light guides

Abstract

This paper presents a preliminary study concerning an x-ray detector design to analyze a small area with high spatial resolution. The indirect method of x-ray detection is used. In this design, an array of scintillating CsI:Tl crystals, encapsulated in aluminum, is coupled with an array of photodetectors. This structure, patented and described by the authors in detail in previous works, can be obtained using the SU-8 negative photoresist as a sacrificial layer. The experimental work consisted in the deposition of a scintillator layer, and an aluminum layer, on the active area of a commercially available digital imaging sensor, thus supporting the developed detector design. X-ray imaging tests were performed using the PHILIPS X’Pert equipment. Promising results were obtained, featuring high resolution and detail.