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TitleDesign of a polymer 3D-thermal accelerometer
Author(s)Silva, C. S.
Cerqueira, M. F.
Ribeiro, J. F.
Gonçalves, L. M.
Pontes, A. J.
Viana, J. C.
Rocha, Luís A.
KeywordsPolymer microtechnologies
3-axis accelerometer
Thermal accelerometer
Issue date19-Jun-2011
Abstract(s)A completely new approach for the fabrication of 3-axis thermal accelerometers is presented in this paper. Microinjected polystyrene micro-parts are assembled with active polyimide membranes enabling the construction of an innovative polymer based thermal accelerometer. The use of polymers (polystyrene and polyimide) with low thermal conductivities improves the overall power consumption of the thermal accelerometer and enables a simple and low-cost fabrication process (no clean room infrastructure required).
AccessRestricted access (UMinho)
Appears in Collections:CAlg - Resumos em livros de atas/Abstracts in proceedings
DEI - Artigos em atas de congressos internacionais
IPC - Resumos alargados em actas de encontros científicos internacionais com arbitragem

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