Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/14559

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dc.contributor.authorAlves, L. L.-
dc.contributor.authorMarques, L.-
dc.contributor.authorPintassilgo, C. D.-
dc.contributor.authorWattieaux, G.-
dc.contributor.authorBerndt, J.-
dc.contributor.authorBoufendi, L.-
dc.contributor.authorEs-Sebbar, E. T.-
dc.contributor.authorCarrasco, N.-
dc.contributor.authorCernogora, G.-
dc.date.accessioned2011-11-23T14:02:08Z-
dc.date.available2011-11-23T14:02:08Z-
dc.date.issued2011-
dc.identifier.urihttp://hdl.handle.net/1822/14559-
dc.descriptionApresentação em poster; publicado em: Bulletin of the American Physical Society. 56:15 (2011).por
dc.description.abstractThis paper studies capacitively coupled radio-frequency discharges (13.56MHz frequency) in pure nitrogen, produced within the LATMOS and the GREMI cylindrical parallel-plate reactors, surrounded by a lateral grounded grid, at 2-30W coupled powers and 0.2-1 mbar pressures. Simulations use an hybrid code [1] that couples a 2D (r,z) time-dependent fuid module for the charged particles and a 0D kinetic module for the nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define space-time dependent electron parameters for the fuid module and to work-out space-time average rates for the kinetic module. The model gives good predictions for the self-bias voltage and for the intensities of radiative transitions (average and spatially-resolved OES measurements)with the nitrogen SPS and FNS, and with the argon 811nm atomic line (present as an actinometer). Model results underestimate the experimental electron density (average resonant-cavity measurements) by a factor of 3-4. [1] L. Marques et al, J. Appl. Phys. 102, 063305 (2007).por
dc.language.isoengpor
dc.rightsopenAccesspor
dc.titleCapacitively coupled radio-frequency discharges in nitrogen at low-pressurepor
dc.typeconferencePoster-
dc.peerreviewedyespor
dc.relation.publisherversionhttp://www.aps.org/meetings/meeting.cfm?name=GEC11por
sdum.publicationstatuspublishedpor
oaire.citationConferenceDate14 - 18 Nov. 2011por
oaire.citationConferencePlaceUtah, USApor
oaire.citationTitle64th Gaseous Electronics Conference of The American Physical Society (GEC11)por
sdum.conferencePublication64th Gaseous Electronics Conference of The American Physical Society (GEC11)por
Appears in Collections:CDF - FCT - Comunicações/Communications (with refereeing)

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