Phosphorous and boron doping of nc-Si:H thin films deposited on plastic

Utilize este identificador para referenciar este registo: https://hdl.handle.net/1822/14285

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Campo DC	Valor	Idioma
dc.contributor.author	Filonovich, Sergej	-
dc.contributor.author	Ribeiro, M.	-
dc.contributor.author	Rolo, Anabela G.	-
dc.contributor.author	Alpuim, P.	-
dc.date.accessioned	2011-11-14T11:51:03Z	-
dc.date.available	2011-11-14T11:51:03Z	-
dc.date.issued	2007	-
dc.date.submitted	2008-01-15	-
dc.identifier.issn	0040-6090	por
dc.identifier.uri	https://hdl.handle.net/1822/14285	-
dc.description	The authors thank Dr. S. Chiussi (University of Vigo) for SIMS measurements. One of the authors (S.A.F.) acknowledges Fundação para a Ciência e Tecnologia (FCT) for a post-doctorate grant.	por
dc.description.abstract	Gas-phase phosphorous and boron doping of hydrogenated nanocrystalline thin films deposited by HWCVD at a substrate temperature of 150 °C on flexible-plastic (polyethylene naphthalate, polyimide) and rigid-glass substrates is reported. The influence of the substrate, hydrogen dilution, dopant concentration and film thickness on the structural and electrical properties of the films was investigated. The dark conductivity of B- and P-doped films (σd=2.8 S/cm and 4.7 S/cm, respectively) deposited on plastic was found to be somewhat higher than that found in similar films deposited on glass. n- and p-type films with thickness below ~50 nm have values of crystalline fraction, activation energy and dark conductivity typical of doped hydrogenated amorphous silicon. This effect is observed both on glass and on plastic substrates.	por
dc.language.iso	eng	por
dc.publisher	Elsevier 1	por
dc.rights	restrictedAccess	por
dc.subject	Hot-Wire CVD	por
dc.subject	nc-Si:H	por
dc.subject	Phosphine	por
dc.subject	Diborane	por
dc.subject	Low-temperature deposition	por
dc.subject	Doping	por
dc.subject	Plastics	por
dc.title	Phosphorous and boron doping of nc-Si:H thin films deposited on plastic	por
dc.type	article	por
dc.peerreviewed	yes	por
dc.relation.publisherversion	http://www.sciencedirect.com/science/article/pii/S0040609007009819	por
sdum.publicationstatus	published	por
oaire.citationStartPage	576	por
oaire.citationEndPage	579	por
oaire.citationIssue	5	por
oaire.citationTitle	Thin Solid Films	por
oaire.citationVolume	516	por
sdum.journal	Thin Solid Films	por
Aparece nas coleções:	CDF - FMNC - Artigos/Papers (with refereeing)

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