Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/14229

TitleDetermination of infrared optical parameters of SrTiO3 thin films from the reflectivity spectrum
Author(s)Almeida, B. G.
Pietka, A.
Caldelas, P.
Mendes, J. A.
Ribeiro, J. L.
KeywordsStrontium titanate
Thin films
Laser ablation
Fourier transform infrared spectroscopy
Issue date2006
PublisherElsevier
JournalThin Solid Films
Abstract(s)Strontium titanate thin films have been prepared at different oxygen pressures and subjected to different post-deposition annealing treatments. The films were deposited on Si substrates with a silica buffer layer. Infrared reflectance measurements were performed to determine the optical parameters, and the spectra were fitted using adequate dielectric function forms for the layers and the substrate. The as-deposited films were found to be amorphous. Their infrared spectra presented bands corresponding to highly damped vibrational modes. As the annealing time and temperature were increased, the strontium titanate layer optical parameters became closer to those corresponding to bulk SrTiO3 and a strong increase of the silica layer thickness was observed. The silica layer growth was attributed to the gradual oxidation of the Si substrate during the annealing that induced also a blueshift of the silica Si–O asymmetric stretching frequency. This frequency shift was associated to a decrease in the silicon oxide density as the progressive layer oxidation originated a variation of its stoichiometry from SiO1.5 towards amorphous SiO2.
TypeArticle
URIhttp://hdl.handle.net/1822/14229
DOI10.1016/j.tsf.2006.01.055
ISSN0040-6090
Peer-Reviewedyes
AccessRestricted access (UMinho)
Appears in Collections:CDF - FCD - Artigos/Papers (with refereeing)

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