Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/13774
Título: | The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering |
Autor(es): | Rolo, Anabela G. Campos, J. Ayres de Viseu, T. M. R. Arôso, T. de Lacerda Cerqueira, M. F. |
Palavras-chave: | ZnO Thin films X-ray Raman Stress |
Data: | 2007 |
Editora: | Elsevier |
Revista: | Superlattices and Microstructures |
Resumo(s): | In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/13774 |
DOI: | 10.1016/j.spmi.2007.04.069 |
ISSN: | 0749-6036 |
Versão da editora: | http://www.sciencedirect.com/science/article/pii/S0749603607001036 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - FMNC - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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AESO-ZnO-SM2007.pdf | Documento principal | 414,83 kB | Adobe PDF | Ver/Abrir |