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|Title:||The annealing effect on structural and optical properties of ZnO thin films produced by RF sputtering|
|Author(s):||Rolo, Anabela G.|
Campos, J. Ayres de
Viseu, T. M. R.
Arôso, T. de Lacerda
Cerqueira, M. F.
|Journal:||Superlattices and Microstructures|
|Abstract(s):||In this work, a study of the structure and optical properties of undoped ZnO thin films produced by r.f. magnetron sputtering technique as a function of the growth parameters is reported. Modification under annealing conditions is also analysed. Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction and optical transmittance have been used. From the position of the (002) X-ray diffraction peak and the E2 (high) mode detected in Raman spectra, the residual stress both in the as-grown and in the annealed samples has been estimated.|
|Appears in Collections:||CDF - FMNC - Artigos/Papers (with refereeing)|
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