Browsing by subject Permeation barrier

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Showing results 5 to 5 of 5. < previous 
Issue DateTitleAuthor(s)TypeAccess
3-Aug-2013The effect of argon plasma treatment on the permeation barrier properties of silicon nitride layersMajee, Subimal; Cerqueira, M. F.; Tondelier, D., et al.ArticleOpen access